About: http://webisa.webdatacommons.org/62062443

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention also provides semiconductor wafers and other workpieces produced from these processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com