About: http://webisa.webdatacommons.org/62084377

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The downstream plasma density is relatively low but activated species such as excited molecules and radicals contribute to film growth when the source is used for reactive film deposition 428
http://www.w3.org/ns/prov#wasQuotedFrom	osti.gov