About: http://webisa.webdatacommons.org/62086603

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chamber of claim 18, wherein the chamber is a plasma enhanced chemical vapor deposition coating chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com