About: http://webisa.webdatacommons.org/6210500

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In process portion 471, the microfeature workpiece is contacted with a polishing surface of a polishing medium, e.g. a polishing pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com