About: http://webisa.webdatacommons.org/62368463

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A manufacturing method according to the item 12, wherein the first insulating film, the second conductive film and the second insulating film are a silicon oxide film, copper and a silicon nitride film, respectively. [0051] 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com