About: http://webisa.webdatacommons.org/62370271

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	material such as GaAs or InGaAs, or InGaAsP. If the broken loop resonator 103 and optical modulator 109 comprise the same material as the substrate 101, the optical modulator 109 can be fabricated directly on the substrate 101.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com