About: http://webisa.webdatacommons.org/6250399

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Uniform removal of material will avoid leaving some regions unmodified and other regions over-modified with the possible destruction of previously created features of an underlying layer, such as metal interconnects.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com