About: http://webisa.webdatacommons.org/6269212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulated-gate field-effect transistor according to claim 9, wherein each of said source/drain doped regions is a double-doped region formed in a self-aligned manner with respect to said side wall insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com