About: http://webisa.webdatacommons.org/6297543

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any shape via may be made using DRIE techniques according to the invention including round, square, rectangular and oval shaped vias.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca