About: http://webisa.webdatacommons.org/63090658

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	adding a layer of bottom electrode material comprising a compound or alloy including a metal and nitrogen on the contact surface of the contact plugs of the substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com