About: http://webisa.webdatacommons.org/63278987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Even when a low-resistance material, such as copper or silver, is employed as an interconnect material, enhancement of performance of the semiconductor device will be impeded.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com