About: http://webisa.webdatacommons.org/63356750

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to the drawings in detail, and particularly to FIGS. 1 and 2, there is shown a rapid thermal processor device 10 for the treatment of semiconductor wafers 62, utilized primarily in the electronics industry.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com