About: http://webisa.webdatacommons.org/6351634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An even more preferred embodiment is a pair of lithographically patterned (e.g., via photolithography, silk-screening, etc.) devices.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com