| http://www.w3.org/ns/prov#value | - In addition, electric characteristics can be improved by reducing such problems as a signal delay caused by a contact resistance between the interface pad 480 and the metal electrode 950 of FIG. 20. [0060]FIGS. 28, 29 and 30 are cross-sectional views illustrating a process of manufacturing an organic EL substrate according to a third preferred embodiment of the present invention.
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