About: http://webisa.webdatacommons.org/63915828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ms such as a gate electrode, a source wiring, a drain wiring, and a pixel electrode can all be manufactured by sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com