About: http://webisa.webdatacommons.org/64128717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since impurities, such as carbon, oxygen, and nitrogen, mixed in a film may hinder subsequent crystallization, it is preferable to thoroughly reduce them.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com