About: http://webisa.webdatacommons.org/64137869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph comparing etch rates across the wafer surface with the focus ring (white square curve) and without the focus ring (black square curve).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com