About: http://webisa.webdatacommons.org/64192000

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since FIGS. 6a and 6b are an example for the sputter target 7000', an insulation flange 515c may be used and may be selected to be of a material that is both vacuum compatible and electrically insulating, preferably a machinable ceramic.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com