About: http://webisa.webdatacommons.org/64454627

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph comparing the final resist line widths for isolated and densely packed features, both having an original mask line width of 0.5 microns.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com