About: http://webisa.webdatacommons.org/6448613

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, during formation of the oxide layer 56, a dopant 6 such as nitrogen is provided at an increased levels at locations where the self-induced spacer is to be subsequently formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com