About: http://webisa.webdatacommons.org/64553562

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Similarly, the Cu-dummy wire 10, TaN-film 7, and low-relative-dielectric-constant film 2 are formed of different types of materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com