About: http://webisa.webdatacommons.org/64571397

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, transistors each including a gate electrode, a source and a drain are formed on the silicon substrate, followed by forming a first interlevel dielectric film covering the transistors on the silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com