About: http://webisa.webdatacommons.org/64664985

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a schematic cross-sectional side view of the load lock shown in FIG. 2 with its substrate support at a down position; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com