About: http://webisa.webdatacommons.org/64773399

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	High-precision contact holes can be formed using a dry etching process such as reactive ion etching, reactive ion beam etching, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com