About: http://webisa.webdatacommons.org/64817074

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	CMP is a rapidly emerging technology playing an increasingly critical role in global planarization for microelectronics fabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	scsolutions.com