About: http://webisa.webdatacommons.org/64897115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein the second recess etching comprises using a gas mixture including HBr and Cl2 gases and SF6 and O2 gases, and
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca