About: http://webisa.webdatacommons.org/6490861

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Incidentally, when the trench is formed by trench etching, as shown in FIG. 4, there is a case where silicon residues (black silicon) 6 a are produced during the formation of the trench 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com