About: http://webisa.webdatacommons.org/6500902

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In regard to the vicinity of the periphery of a pattern transfer area, no pattern is formed in a peripheral area of a wafer substrate, which poses problems including the following defects.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com