| http://www.w3.org/ns/prov#value | - The method as recited in one of claims 1 through 5, wherein, for the first protective layer (41) and/or for the second protective layer (71) and/or for the third protective layer and/or for the fourth protective layer, at least partially the same material is selected, such as, specifically, an oxide, such as silicon oxide. 7.
|
