About: http://webisa.webdatacommons.org/65386710

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition reactants include a source chemical and a reducing agent, such as the reactants described above with respect to the formation of metal thin films.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com