About: http://webisa.webdatacommons.org/65488113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, a secondary detection or the like in which detection is performed afterheat decomposition occurs, is performed on gases such as PFC, NF.sub.3 and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com