About: http://webisa.webdatacommons.org/65493763

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Chemical vapor deposition, plasma assisted chemical vapor deposition, and sputtering are examples of suitable techniques for forming all or part of layers 62-66.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com