About: http://webisa.webdatacommons.org/65539611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This RCA cleaning process involves oxide etch chemicals, such as HF, wherein a top surface of the layer 20b will be disadvantageously removed by the HF exposure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au