About: http://webisa.webdatacommons.org/65544038

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, for the device 10, a starting component is a silicon wafer on which the layer 20 of silicon nitride is formed by a chemical vapor deposition (CVD) process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca