About: http://webisa.webdatacommons.org/65635837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film thicknesses of these silicon oxide films are for example about 10 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com