About: http://webisa.webdatacommons.org/65670819

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	There is a strong need to use optimization systems and processes to better match lots and tools, especially in photolithography which is a known bottleneck area.
http://www.w3.org/ns/prov#wasQuotedFrom	appliedmaterials.com