About: http://webisa.webdatacommons.org/65688988

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The radiation-sensitive resin composition includes a polymer component including a polymer having an acid-labile group, and a radiation-sensitive acid generator.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org