| http://www.w3.org/ns/prov#value | - The method of claim 25, wherein the auxiliary substrate is one of a dielectric substrate such as sapphire, glass, and quartz; a semiconductor substrate such as Si, GaAs, InP, and InAs; a conductive oxide film such as Indium Tin Oxide (ITO), ZrB, and ZnO; a metal substrate such as CuW, Mo, Au, Al, and Au; and a metal film. 27.
|
