About: http://webisa.webdatacommons.org/6576939

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the thus obtained support with a desired surface roughness, the metal thin-film is formed by any conventional methods such as vacuum deposition, ion plating, sputtering, and CVD method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com