| http://www.w3.org/ns/prov#value | - The trench isolation regions 208 a, 208 b are filled with a dielectric material, which may be an oxide material, for example a silicon oxide such as SiO or SiO2, a thermally grown oxide, oxynitride, a nitride material such as silicon nitride, silicon carbide, a high temperature polymer, or other suitable dielectric materials.
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