About: http://webisa.webdatacommons.org/6594963

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 3(d), as in the first embodiment, the whole surface including the portion half-etched in the preceding step is coated with the second resist 12 of positive liquid type and exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com