About: http://webisa.webdatacommons.org/66003528

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates generally to semiconductor materials, and more particularly to semiconductor-on-insulator substrates with a recess-resistant layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com