About: http://webisa.webdatacommons.org/66067974

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process equipment 14 includes one or more process tools which perform processing operations such as metal deposition, oxide growth, and source/drain implant.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com