About: http://webisa.webdatacommons.org/6614168

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the above prior art, however, there is a problem that when the first gate bus interconnection 65 is formed, the low resistive metal is dissolved into the chemicals for photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com