About: http://webisa.webdatacommons.org/66553888

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A mask writing system 300 shown in FIG. 7 is a system that uses a large-size mask 30 written by the pattern writing system 100, thereby writing a mask for a general exposure system on a mask substrate 31.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com