About: http://webisa.webdatacommons.org/66894973

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is an image of the result of scanning a wafer surface using the aforementioned device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr