About: http://webisa.webdatacommons.org/67018782

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3B is a perspective view of a height sensor and two piezoelectric tubes serving as the fine stage to illustrate the second embodiment of the fine stage and sensor assembly.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com