About: http://webisa.webdatacommons.org/67066320

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a flowchart illustrating an exemplary method of laser machining features smaller than about 200 nm using ultrafast UV laser pulses, according to the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com