About: http://webisa.webdatacommons.org/6714747

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In Step S201, a driving device, such as a TFT, is formed on an upper substrate using a TFT array process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com