About: http://webisa.webdatacommons.org/67321410

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The thickness of the intermediate layer is generally greater than 0.3 ??m and is preferably in the range from 0.5 to 15 ??m, in particular from 1.0 to 10 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com